FrenchEnglish
  • Home
  • Business
    • Coating Services
    • Thick layers
    • Water treatment & Sensing
    • CVD Equipments
  • Technology
    • Diamond Films
    • CVD technologies
    • Nanostructured Diamond
  • Products
    • neoDiam®-Coatings
    • neoDiam®-Decorative
    • NeoCoat®-Electrodes
      • BDD/Silicon
      • BDD/Metal
      • Analytics
    • CVDiam® Equipments
      • Hot Filament CVD
      • Microwave Plasma CVD
  • Profile
    • Company
    • Quality policy
    • Partners
    • Legal Disclaimer
  • Downloads
    • Flyers
    • Technical
  • Contact
    • Information request
    • Contact

Standard NeoCoat®-Electrodes on silicon

1_standard neocoat electrodes2_standard neocoat electrode3_standard neocoat electrode4_standard neocoat electrode

 

BDD coating characteristics

Thickness Doping level Resistivity
μm ppm at.cm-3 mΩ.cm
2-3 100 3.1019 500
2-3 700 2.1020 100
2-3 2500 8.1020 14
2-3 5000 2.1021 4
2-3 10000 3.1021 2

 

Available shapes, sizes and substrates:

p-Silicon Thickness (mm) Size (mm) Coated side Available doping level (ppm)
Monocrystalline 2 Rectangle, 50 x 25 Monopolar (one) 700, 5000, 10000
Monocrystalline 2 Rectangle, 50 x 25 Bipolar (two) 700
Monocrystalline 2 Disc, Φ100 Monopolar (one) 100, 700, 2500, 5000, 10000
Monocrystalline 2 Disc, Φ100 Bipolar (two) 700
Monocrystalline 1 Square, 100 x 100 Monopolar (one) 100, 700, 2500, 5000, 10000
Monocrystalline 1 Square, 100 x 100 Bipolar (two) 700

 

For other specifications please visit the Custom NeoCoat-Electrodes section.

 

 

Custom NeoCoat®-Electrodes on silicon

 

1_custom_neocoat_electrodes2_Custom Electrode2_Custom Electrodes

NeoCoat is able to offer a wide variety of custom electrodes:

  • Different doping level and thicknesses,
  • Different shapes and sizes by using various specific cutting techniques.

Substrate Mono- or polycristalline silicon (10-3 - 104 Ω.cm)
Electrode Shape Disc, square, rectangular tailored shapes
External Size Discs (3 to 200 mm), squares (3x3 to 100x100 mm)
BDD Thickness From less than 100 nm up to more than 25 μm
Boron concentration 100-10’000 ppm
BDD resistivity (mΩ.cm) 2 - 10’000
Thickness uniformity (3σ) ±5% (within 100 mm)
Grain size 40 nm at 100 nm film thickness
0.5 µm at 3µm film thickness
DCOI (Diamond Coating On Insulator) Diamond coating is also available on some insulating material such as Si3N4/SiO2
Specific treatment Backside metallization with gold available on request
NeoCoat SA  -  Eplatures-Grise 17, CH-2300 La Chaux-de-Fonds, Switzerland  -  +41 32 930 29 40                       © 2012 - 2021       Legal disclaimer