Nanostructured Diamond Devices

Diamond or Diamond-on-insulator (DOI) coatings combined with mask less lithography for custom structured device manufacturing

Maskless laser lithography for micro etching of thin film on wafers (100 to 200 mm) to manufacture NANOFORMS
Multistep manufacturing processes (Silicon treatment, Diamond coating, Si₃N₄/SiO₂ or custom coatings, selective etching...)
Multi-wafer batch production
From small series (fews components) to large series (> 10-100 K chips)

A typical application is diamond microdisc array (MDA) or interdigitated array (IDA) of electrodes for high performance analytical applications