CVDiam® - MWCVD
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Fully automated and safe industrial microwave plasma CVD reactor:
- 2.45 GHz, 6kW microwave source
- Load-lock
- z-moving substrate holder
- Temperature controlled substrate holder (independently from microwave power)
- Turbomolecular Pump, gas panel, cooling system included in a monoframe design
- User-friendly GUI for both operator and R&D engineer
Global customer offer (Consulting, Equipment, Process and Technical support)
Main applications:
- Jewelry
- Optical applications
- Radiation detectors
- Functional or decorative
- High-end tools
- Thermal management